ex­treme ul­tra­vi­o­let lithog­ra­phy

Linux User & Developer - - Tutorial -

The litho­graphic tech­niques that have been used for sev­eral pro­ces­sor gen­er­a­tions are start­ing to run out of steam.

To go be­yond

7nm, a to­tally new tech­nique called Ex­treme Ul­tra­vi­o­let Lithog­ra­phy (EUV) will most likely be needed.

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